Yamato 等離子反應機Plasma Reactor (Barrel Chamber)-2

Features Compact, space saving design with oscillation section integrated with a portion of the chamber Outstanding operability and safety with the automatic tuning system as standand component Equipped with a large quartz chamber (ø215mm) which can process big testing samples Applications Removal of photoresist Cleaning of parts Surfactant treatment Micro polishing Corresponds to wafer and glass substrate