Miraial Wafer Carrier (PFA) 3 Inches　KM-30

Feature

• Opening area is large and excellent in detergency.
• As for KM-30-52, pocket spacing is narrow and can storage 52pieces of wafer.
• KM-30WD, open side wall is especially large and excellent in detergency. But does not correspond to horizontal transfer of wafer and PFA handle.

Specifications

• Model number: KM-30
• Wafer diameter (mm): 76 (3″)
• Size (mm): 93.6 x 142.25 x 83
• Amount of storage 25 sheets
• Material: SEMIPURASUTO(R) A (PFA)
• D1 dimensions: 13.9mm
• Groove pitch: 4.76mm

Package size

• Package size：95×145×85 mm 330 g