Feature
- Wide open area is used to enhance cleanability.
Specifications
- Model number: KM-20
- Wafer diameter (mm): 51 (2″)
- Size (mm): 67.8 x 142.1 x 59
- Amount of storage 25 sheets
- Material: SEMIPURASUTO(R) A (PFA)
- D1 dimensions: 13.9mm
- Groove pitch: 4.76mm
Package size
- Package size:65×140×65 mm 200 g
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