Max. working temp. 360℃, clean class 100, oxygen concentration less than 50ppm. Program operation function, auto / manual mode. Fast temp. rising and cooling, and air cooling or air cooling+water cooling are available for cooling method. Equipped with auto lock, digital pressure gauge, digital flowmeter, etc. Equipped with safety devices such as auto overheat protector, overheat protector, abnormal N2 pressure, abnormal N2 flow, over-current earth leakage circuit breaker, etc.