LIGHTMACHINERY IPEX-800系列準分子雷射器

Originally developed by Lumonics and now offered by LightMachinery, the IPEX-840/860 Series excimer lasers deliver the performance and reliability required for a wide range of advanced, high duty-cycle industrial manufacturing applications in the electronics, semiconductor and medical device industries.

With ICON ™ (Integrated-Ceramic-On-Nickel) technology, LightMachinery IPEXSeries lasers offer an exceptionally low cost of ownership and superior optical performance. High-Brightness (“Unstable Resonator”) optics are available for applications that demand long-path low beam divergence (e.g. Lidar), extended coherence length (e.g. FBG manufacturing) and improved focusing.

Easy to use, simple to service, and economical to operate, IPEX-840/860 Series lasers combine the benefits of high precision excimer processing with the lowest total cost of ownership and highest uptime on the market today.



FEATURE
Extended gas lifetime, long replacement intervals, low operating cost
Simplifies optical maintenance, retains gas fill and passivation
Delivers 200 microradian pointing stability
No realignment required after cleaning or replacing optics
Fast, precise energy stabilization in internal, burst and external trigger modes
Excellent energy stability, better than 1.0% (1-σ, KrF)
Removes particulates and maintains optics cleanliness