Mass Flow Controller 500SCCM-N2　C1005

Feature

• Adopts thermal flow sensor less susceptible to external temperatures.
• Restricts flow surge phenomena at the time of start.

Specifications

• Model number: C1005
• Full scale flow rate - gas type: 500SCCM-N2
• Gas type: N2
• Flow rate accuracy: +/- 2% FS (accuracy guaranteed range: 15 - 35℃)
• Responsiveness: 6sec
• Flow rate control range: 5 - 100% FS
• Input and output: Analog signal (0 - 5VDC)
• Valve type: N/O normal open
• Reproducibility: +/- 0.2% FS
• Operation pressure range: 50 - 300kPa
• Pressure resistance: 1MPa (G)
• External leak rate: 1 x 10 - 7Pa, m3/sec (He) or less
• Gas contact unit material: Stainless Steel (SUS316), PTFE, Fluorine rubber
• Connection: Equivalent to 1/4in.SWL
• Power supply: + 15VDC +/- 5% 60mA, - 15VDC +/- 5% 150mA
• Communication system: Analog 0 - 5VDC (D-Sub9Pin connector)
• Size: 127 x 25.5 x 100mm

Package size

• Package size：150×205×70 mm 690 g