KOJIMA Small Handy Mass Flow Measurement Unit FLOW COMPO (TM) 3100MFM 10Sccm/Min　FCM4000-3100-AIR-10SCCM-1/4SW-20

Feature

• Small handy mass flow measurement unit with built-in high grade mass flow meter and readout unit for small flow rate of F.S.1SCCM.
• Touch panel type for easy operation.
• If requested, it can be made for fluids other than AIR (N2, H2, He, Ar, O2, CO2, and other gases). Please consult me.

Specifications

• Sensor: Thermal sensor
• Fluid: AIR (*Other N2, H2, He, Ar, O2, conforms to CO2, and various other gases. Contact us for any questions. )
• Full scale: 10sccm/min (20℃ 1atm volume flow rate display) (*0℃ calibration capable. Contact us for any questions. )
• Flow rate accuracy: ±1.0% F.S. (20℃)
• Pressure resistance: 980KPA(G)
• Gas contact unit material: Stainless Steel (SUS316L), FKM etc.
• Connection port size: 1/4 Swagelok (*For other fitting, consult with us. )
• Power supply: AC 85 - 264V 48 - 440Hz