Feature
- KM-60WD, open side wall is especially large and excellent in detergency. But does not correspond to horizontal transfer of wafer and PFA handle.
Specifications
- Model number: KM-60NA
- Wafer diameter (mm): 150 (6″)
- Size (mm): 187 x 142.24 x 165
- Amount of storage 25 sheets
- Material: SEMIPURASUTO(R) A (PFA)
- D1 dimensions: 13.97mm
- Groove pitch: 4.76mm
Package size
- Package size:320×250×200 mm 1 kg
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