Feature
- Opening area is large and excellent in detergency.
- As for KM-30-52, pocket spacing is narrow and can storage 52pieces of wafer.
- KM-30WD, open side wall is especially large and excellent in detergency. But does not correspond to horizontal transfer of wafer and PFA handle.
Specifications
- Model number: KM-30
- Wafer diameter (mm): 76 (3″)
- Size (mm): 93.6 x 142.25 x 83
- Amount of storage 25 sheets
- Material: SEMIPURASUTO(R) A (PFA)
- D1 dimensions: 13.9mm
- Groove pitch: 4.76mm
Package size
- Package size:95×145×85 mm 330 g
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